replacement metal gate
由RSingh著作·2022—Inthiswork,weproposeanovelasymmetricfinfield-effecttransistor(FinFET)-basedaccessdevice,alongwithaprocessflow,ata3-nmnode.,由RBao著作·2019·被引用9次—Abstract.Thispaperaddressesnovelapproachesatmaterialandintegrationfrontsforgate...
Replacement metal gate resistance in FinFET architecture ...
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Inthispaper,wedevelopamultiplicativemodeltosimulatethetungsten(W)filmresistivityandgateresistanceforreplacementmetalgate(RMG)withW ...
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